Aerotech AHL9000 Linear Motor Stage
The AHL9000 linear motor stage combines air bearings for the scan axis and mechanical bearings for the step axis, and has been designed for demanding applications that require excellent step and scan performance.

行程：≤350 mm
定位精度：± 1.0 µm
重復定位精度：±0.2 µm
直線度：±0.6 µm
平面度：±0.6 µm