AirBeam^TM 系列空氣軸承直線電機平臺是Computer-To-Plate 系統、繪圖儀、晶片掃描系統和工廠自動化應用的理想選擇。

• 高速直線電機驅動
• Clog-free空氣軸承技術 
• 行程：305mm和610mm
• 定位精度：10 µm 和12 µm
• 雙向重復性：±1個計數
• 平面度和直線度：2µm

AirBeam Single Axis Shuttlle
◆ Ultra-smooth - ideal for scanning applications
◆ Virtually unlimited service life without particle generation
◆ High speed linear motor
◆ Air bearing accuracy
◆ Internal cables
◆ Clog-free air bearing technology

Linear Motor Air Bearing Stage
The AirBeam Series is ideal for Computer-To-Plate systems, photoplotters, wafer scanning systems, and factory automation applications. It provides straight, stiff, cog-free motion at resolutions less than a micron. The AirBeam combines breakthrough linear servo motor technology and an ultrasmooth air bearing way in a single structural beam. The linear motor and modular, serviceable moving cable set are uniquely mounted inside the main beam, minimizing particulate generation. The integral linear motor allows carriage speeds up to 1 meter per second, and accelerations up to 1 G. The linear encoder mounts just below the upper surface, minimizing Abbé error. A laser interferometer option is available for particularly demanding OEM applications with resolution down to 2.5 nanometers. Since the air bearing carriage, linear motor, and linear encoder are non-contact devices, the AirBeam provides virtually unlimited life without particle generation.

Danaher Motion-Dover's unique clog-free air bearing technology provides superior reliability while eliminating costly filtration requirements, and requires minimal air consumption. The AirBeam series mounts via 3 points, eliminating degradation of positioning accuracy due to imperfect mounting surfaces. Locking, D sub-mini connectors with strain-relieved cables mount on the box beam end plate to provide convenient access to motor and limit/encoder signals. An auxiliary connector is provided for user signals, and terminates on the air bearing moving carriage. Please contact one of our Applications Engineers when high stability is needed. An optional solenoid may be added which rapidly disables compressed air to the moving carriage, resulting in a "Coulomb welded" state. In this state, motion between the spar and carriage is eliminated at the atomic level, and the only relative movement is due to thermal phenomena.