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                筑造一座橋梁 科技連接世界
                首頁 > 產品與技術 > 精密定位平臺 > 精密轉臺 > ABRS 系列空氣軸承精密直驅轉臺

                Aerotech  ABRS系列空氣軸承精密直驅轉臺提供出色的角度定位,速度穩定性和無誤差運動性能,并且擁有非常低矮的外形。
                 ★ 直驅無刷無槽伺服電機
                 ★ 零齒槽效應帶來顯著的速度穩定性
                 ★ 顯著的無誤差無抖動運動特性
                 ★ 扁平設計的低矮外形
                 ★ 直徑:128.1-278.1 mm
                 ★ 分辨率: 0.036-0.18 arc-sec
                 ★ 雙向重復性:< 1 arc-sec
                 ★ 定位精度:±2 arc-sec

                 
                zPictures/Product_423.jpg   ABRS 直驅轉臺性能指標

                Direct-drive, slotless brushless servomotor
                Zero cogging motor for outstanding velocity stability
                Outstanding error motion and wobble performance
                Direct coupled, high accuracy rotary encoder
                Low profile, planar design
                No mechanical contact

                 

                Aerotech’s ABRS series rotary air-bearing stages provide superior angular positioning, velocity stability, and error motion performance in an exceptionally low-profile package. The ABRS is designed to meet the exacting requirements of wafer inspection, high precision metrology, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.

                Compact Package
                The design of the ABRS series direct-drive rotary stage has been optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system, minimizing “stack-up” related errors. In addition to the low overall height, the ABRS series provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements.

                Superior Mechanical Design
                The ABRS design features large air-bearing surfaces for high stiffness and load capacity, producing not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.

                Brushless Direct-Drive
                To maximize positioning performance, the ABRS series utilizes Aerotech’s S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque ripple-free. This makes the ABRS stages ideal for applications requiring smooth scan velocities at low or high speeds.

                Accurate Positioning
                An optical encoder is standard with the ABRS. When coupled with Aerotech’s feedback multipliers and controls, resolutions of <0.03 arc second are achievable.

                Custom Designs
                Custom versions of the ABRS are available for rate table and inertial guidance test-stand applications.

                Notes:     
                1. Maximum resolution presumes A3200 controller using MXH500 multiplication, and accounts for controller quadrature.     
                2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.     
                3. Maximum loads are mutually exclusive.     
                4. All error motion specifications measured at 60 rpm.     
                5. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller is recommended.     
                6. Air supply must be clean, dry to 0° F dew point, and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.

                 

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                A-CON is a motion control, positioning and automation systems integrator.

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