- Driven by direct drive high performance linear motor
- Superior flatness and straightness from non-contact air-bearing guidance system for smooth, no noise and low particle generation operation
| Top Axis | ||
| Specifications | AUM2-S2 | |
| Performance Parameters | Unit | Series |
| Continuous Force, coil @100°C | N | 22.0 |
| Peak Force | N | 88.0 |
| Motor Constant | N/SqRt(W) | 4.31 |
| Continuous Power | W | 26.0 |
| Peak Power | W | 416.0 |
| Electrical Cycle | mm | 30 |
| Max Bus Voltage | V | 330 |
| Max Coil Temperature | °C | 125 |
| Thermal Dissipation Constant | W/°C | 0.35 |
| Continuous current | Arms | 2.0 |
| Peak current | Arms | 8.0 |
| Force Constant | N/Arms | 11.0 |
| Back EMF Constant | Vpeak/(m/s) | 9.0 |
| Inductance | mH | 1.5 |
| Terminal Resistance @25°C | Ohms | 6.5 |
| Electrical Time Constant | ms | 0.23 |
| Mechanical Parameters | ||
| Coil Mass | Kg | 0.118 |
| Coil Length | mm | 61 |
| Track Mass (per 120 mm) | Kg | 0.468 |
| Magnetic Attraction | N (lb) | 0 |
