The demand for a high-accuracy, robust, open-frame stage is met with the ALS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed circuit board inspection, and automated assembly.
Design and Construction
The ALS3600 is a three-piece design that allows critical components such as orthogonality, straightness, and flatness to be controlled during the initial machining. This results in a stage with exceptional geometrical tolerances and inherent orthogonality.
The ALS3600 utilizes high-precision linear motion guide (LMG) bearings, with a total of four trucks per axis. These make the ALS3600 ideal for fast, repetitive operations. The LMG bearings also exhibit exceptional stiffness, high load capacity, and extremely low friction.
The high stiffness inherent in this stage allows it to be side-driven, yet still retain excellent performance characteristics. The ALS3600 represents a major upgrade in performance over typical side-drive stages.
Brushless Linear Servomotor
The ALS3600 incorporates a high power linear motor to meet the needs of the most demanding applications. This results in a stage with all of the advantages of a direct-drive mechanism: zero backlash, no windup, exceptional acceleration, zero friction, and outstanding servo stiffness. Many applications require extreme stability of motion that can only be met with a linear motor drive. Since the drivetrain has zero friction and no recirculating elements, the ALS3600 is ideal for scanning, imaging, and many other precision applications.
High-Accuracy Linear Encoder Feedback
The standard feedback device is a high-resolution, noncontact linear encoder. This noncontact encoder offers exceptional repeatability and stability over a range of operating conditions. Both digital and analog output versions are available. The digital version has a resolution of 1 um, while the analog version, when coupled with an Aerotech multiplier box, can reach resolutions of 20 nm.
All stage travels offer both single- and dual-axis designs, as well as the option for a solid tabletop. Miniature microscope-size stages are available, as are ball-screw-driven versions (please refer to the ATS3600).
1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.